英语翻译For pre-vacuum generation the pre-vacuum pump is connect
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英语翻译
For pre-vacuum generation the pre-vacuum pump is connected with the deposition chamber via corner valve = 1-16Y1 / VV3 (bypass oil- diffusion pumps),with the oil diffusion pump =1-3A1 / VP3 via corner valve = 1-16Y1/VV3,and with oil diffusions pump =1-4A1 / VP4 via corner valve =1- 17Y1/VV5.
For pre-vacuum generation the pre-vacuum pump is connected with the deposition chamber via corner valve = 1-16Y1 / VV3 (bypass oil- diffusion pumps),with the oil diffusion pump =1-3A1 / VP3 via corner valve = 1-16Y1/VV3,and with oil diffusions pump =1-4A1 / VP4 via corner valve =1- 17Y1/VV5.
要进行预真空发生,应将预真空泵通过角阀=1-16Y1/VV3(旁通油扩散泵)连接到沉积室,并通过角阀=1-16Y1/VV3连接到油扩散泵=1-3A1/VP3,同时通过角阀1-17Y1/VV5连接到油扩散泵1-4A1/VP4.
英语翻译For pre-vacuum generation the pre-vacuum pump is connect
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