英语翻译GAS PNOZThe gas PNOZ is a safety device used to guarante
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英语翻译
GAS PNOZ
The gas PNOZ is a safety device used to guarantee that the pressure in the process chamber and in the pumping pipe following the process chamber does not exceed a defined value.
The gas PNOZ consists of a test volume with two pressure gauges which execute redundant measuring of the pressure in the pumping pipe.Shutters guarantee the defined supply of nitrogen and defined rate of pump-down.
The gas supply to the process chambers is switched off completely if the maximum pres-sure is exceeded(usually 10 mbar)
ln order to test the measuring heads regularly,each time there is a to status change at the system,a surge of nitrogen is let into the test volume.Both measuring heads must trigger.
process chamber可译作工艺腔
GAS PNOZ
The gas PNOZ is a safety device used to guarantee that the pressure in the process chamber and in the pumping pipe following the process chamber does not exceed a defined value.
The gas PNOZ consists of a test volume with two pressure gauges which execute redundant measuring of the pressure in the pumping pipe.Shutters guarantee the defined supply of nitrogen and defined rate of pump-down.
The gas supply to the process chambers is switched off completely if the maximum pres-sure is exceeded(usually 10 mbar)
ln order to test the measuring heads regularly,each time there is a to status change at the system,a surge of nitrogen is let into the test volume.Both measuring heads must trigger.
process chamber可译作工艺腔
气体PNOZ
气体PNOZ是一安全装置,用来保证工艺腔内的压力,并确保工艺腔下道工序供给泵管道不超出额定值.
煤气PNOZ有一个测试容器,包括两个压力计,对供给泵管道中的压力进行冗余测量.快门保证额定的氮气供应和额定的关泵速率.
如果超过最大(允许)压力(通常是10 mbar),至工艺腔的气体供应将完全关闭.
为保证定期对测量头进行测试,每次系统中出现“待机”到“生产”、状态变化时,将会有氮气涌入测试容器.两个测量头必须都启动.
这个东西不错,可以保证安全运行
气体PNOZ是一安全装置,用来保证工艺腔内的压力,并确保工艺腔下道工序供给泵管道不超出额定值.
煤气PNOZ有一个测试容器,包括两个压力计,对供给泵管道中的压力进行冗余测量.快门保证额定的氮气供应和额定的关泵速率.
如果超过最大(允许)压力(通常是10 mbar),至工艺腔的气体供应将完全关闭.
为保证定期对测量头进行测试,每次系统中出现“待机”到“生产”、状态变化时,将会有氮气涌入测试容器.两个测量头必须都启动.
这个东西不错,可以保证安全运行
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